Name
Advanced Thermal Sciences Taiwan Corp.
What We Do
ATS is a leader of heat exchange chiller manufacturer in the world. We manufacture HEX and chillers with a operating range from -70degC~200degC. The main application of our products specialize in main Etcher system AMT, Lam, TEL, Mattson, Hitachi, and KE etc. Our system provide stable temperature control of +/-1 degC for wafer manufacturing process. We lead in service and repair for all chillers in the industry. We specialize in sales for Galden a heat transfer fluid for semiconductor.
Website
Categories (50)
Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
Phone
886-3-5520088
Address
4F. No. 173, Sec. 3, Huanbei Rd.
Zhubei City
Hsinchu County, Hsinchu County 30244
Taiwan
Zhubei City
Hsinchu County, Hsinchu County 30244
Taiwan